24K Cleanroom Expansion
This 24,000 SF (nominal) facility houses a new ISO 4 bay and chase cleanroom with companion gown room and utility mezzanine. The cleanroom supports the CMP, etch, and implant processes. The project was designed to allow construction to occur in tandem with the day-to-day operations with minimal need to shut the fab down. Utilities, including power, heating and cooling, and process systems were provided or otherwise modified to serve the new cleanroom and support space, with utility mains and laterals routed to support the fab tools.
Client: Confidential
Size: 24,000 SF
Construction Cost: $50M
Completion Date: June 2023
Services:
- Programming and Feasibility Studies
- Hazardous Occupancy Code Evaluations
- Tool Layout Planning
- Semiconductor Tool Installation Design
- Mechanical and HVAC System Design
- Process System and Piping Design
- Electrical System and Lighting Design
- Instrumentation and Controls Design
- Life Safety Security and Telecom Design
- Jurisdictional Permitting Administration and Support
- Engineering Support During Construction
- Project Management
